Microelectromechanical Systems

- Advanced Materials and Fabrication Methods

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    Microelectromechanical Systems
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    Format:
    Bog, paperback
    Udgivelsesdato:
    01-01-1998
    Sprog:
    Engelsk
    Sidetal:
    76
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    Microelectromenchanical systems (MEMS) is a revolutionary field that adapts for new uses a technology already optimized to accomplish a specific set of objectives. The silicon-based integrated circuits process is so highly refined it can produce millions of electrical elements on a single chip and define their critical dimensions to tolerances of 100-billionths of a meter. The MEMS revolution harnesses the integrated circuitry know-how to build working microsystems from micromechanical and microelectronic elements. MEMS is a multidisciplinary field involving challenges and opportunites for electrical, mechanical, chemical, and biomedical engineering as well as physics, biology, and chemistry. As MEMS begin to permeate more and more industrial procedures, society as a whole will be strongly affected because MEMS provide a new design technology that could rivalaEURO"perhaps surpassaEURO"the societal impact of integrated circuits.

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    Udgivelsesdato:
    01-01-1998
    ISBN13:
    9780309059800
    Bredde:
    216 mm
    Højde:
    279 mm
    Format:
    Paperback
    Bibliotekernes beskrivelse Microelectromenchanical systems (MEMS) is a field that adapts for new uses a technology already optimized to accomplish a specific set of objectives. MEMS is a multidisciplinary field involving challenges and opportunities for electrical, mechanical, chemical, and biomedical engineering as well as physics, biology, and chemistry.

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