Favoritter
    Log ind Opret dig
    Studiebog
    Handbook of Thin Film Deposition

    Handbook of Thin Film Deposition

    Forfatter: info mangler
    Bog E-bog
    • Format
    • Bog, paperback
    • Engelsk

    Beskrivelse

    Handbook of Thin Film Deposition, Fourth Edition, is a comprehensive reference focusing on thin film technologies and applications used in the semiconductor industry and the closely related areas of thin film deposition, thin film micro properties, photovoltaic solar energy applications, materials for memory applications and methods for thin film optical processes. The book is broken up into three sections: scaling, equipment and processing, and applications. In this newly revised edition, the handbook will also explore the limits of thin film applications, most notably as they relate to applications in manufacturing, materials, design and reliability.

    Læs hele beskrivelsen
    Detaljer
    Størrelse og vægt
  • Vægt950 g
    • coffee cup img
    10 cm
    book img
    19,1 cm
    23,5 cm

    Findes i disse kategorier...

    Se andre, der handler om...

    Power Flash Optical coatings Cooling Modeling Thermal conductivity Chemical vapor deposition Thin films Silicon Semiconductors Optical films Deposition Hot carriers Abrasives CMOS dram Limits Scaling Thermal management Software reliability EUV Lithography ESD Interconnects FinFET Chemical Mechanical Polishing Electromigration NAND Semiconductor Thin film Reliability testing SiGe Shallow Trench Isolation Capacitor Hast Heat generation FinFETs Acceleration of failure testing A model for failures atomic layer deposition (ALD) Bilayer oxide Back-end reliability Breakdown and reliability of oxides heat production BHAST Charge trap copper electrochemistry Diminishing oxide thickness Cu-CMP damascene Deposition equipment Device leakage Gate dielectrics scaling Gate Oxide Reliability Front-end reliability Film metrology CVD Hafnium oxynitrides Hafnium lanthanum oxynitrides Deposited SiO2 History of chemical vapor deposition Interfacial Layer interference filters ESD testing Modeling Black's equation Mathematics of reliability GIDL interconnect scaling Front end of line (FEOL) microloading Modes of failure Optical coating manufacture Optical filters Nitride cracks History of reliability Oxide field RC delay and transistor capacitance heat production Reliability tests Pattern effects Interface thermal resistance planarization RC delay in wiring Reliability limits to scaling Silicon oxide and silicon nitride films properties Soft error rates silicon CMP Semiconductor deposition tools Stress memorization technique (SMT) Thermal activation Step Coverage Temperature cycling Shallow trench isolation (STI) UV Cure Silicon-germanium channel Silicon strain metrology Transistor fail modes Stress engineering Noise immunity Models for acceleration Memory and logic scaling Scaling past 10-nm node Plasma enhanced CVD (PECVD) Reliability in Flash-SRAM-DRAM Memories Scaling and subnanometer reliability

    Velkommen til Saxo – din danske boghandel

    Hos os kan du handle som gæst, Saxo-bruger eller Saxo-medlem – du bestemmer selv. Skulle du få brug for hjælp, sidder vores kundeservice-team klar ved både telefonerne og tasterne.

    Om medlemspriser hos Saxo

    For at købe bøger til medlemspris skal du være medlem af Saxo Premium, Saxo Shopping eller Saxo Ung. De første 7 dage er gratis for nye medlemmer. Medlemskabet fornyes automatisk og kan altid opsiges. Læs mere om fordelene ved vores forskellige medlemskaber her.

    Machine Name: SAXO080