Kinetics and Spectroscopy of Low Temperature Plasmas

This is a comprehensive textbook designed forgraduate and advanced undergraduate students. Both authors rely on more than 20years of teaching experience in renowned Physics Engineering courses to writethis book addressing the students’ needs.

Kinetics and Spectroscopy of Low Temperature Plasmasderives in a full self-consistent way the electron kinetic theory used todescribe low temperature plasmas created in the laboratory with an electrical discharge,and presents the main optical spectroscopic diagnostics used to characterizesuch plasmas. The chapters with the theoretical contents make use of adeductive approach in which the electron kinetic theory applied to plasmaswith basis on the electron Boltzmann equation is derived from the basicconcepts of Statistical and Plasma Physics. On the other hand, the mainoptical spectroscopy diagnostics used to characterize experimentally such plasmasare presented and justified from the point of view of the Atomic and MolecularPhysics.

Low temperature plasmas (LTP) are partially ionized gases with a broaduse in many technological applications such as microelectronics, light sources,lasers, biology and medicine. LTPs lead to the production of atomic andmolecular excited states, chemically reactive radicals, and activated surfacesites, which are in the origin, among others, of the deposition of thin films,advanced nanotechnology products, solar cells, highly efficient combustionmotors, and treatment of cancer cells.